'New' UV lasers resolve material and cost issues

被引：0
|
作者：
Kincade, K
机构：
来源：
LASER FOCUS WORLD | 2005年 / 41卷 / 06期
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D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
From drilling vias in printed circuit boards to scribing brittle, low-k dielectrics, solid-state UV lasers are making their mark in microelectronics.
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页码：87 / +
页数：4
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