Speed Pack:: an innovative production method for high-quality PVD coating materials

GfE has introduced the innovative 'Speed Pack' (SP) process to its manufacturing technologies for high-quality PVD coating materials for thin-film applications. It is shown that the coating materials produced by SP have several crucial benefits for PVD coating technology, as they provide an extremely fine and homogenous microstructure with density values of approximately 99.5% of the theoretical density. Concerning the composition and target size, the SP process is outstanding due to its flexibility. Due to the large target dimensions possible in one segment, a more continuous coating process can be achieved. Moreover, a metallic backing plate can be simultaneously joined to the target material. Thus, both an excellent mechanical connection and metallurgical bonding by diffusion can be realised, which guarantees optimised heat transfer. (C) 2003 Elsevier Science B.V All rights reserved.