Beam shaping optics expand excimer-laser applications

被引:0
|
作者
Masters, A [1 ]
Geuking, T
机构
[1] Lambda Phys, Ft Lauderdale, FL USA
[2] Lambda Phys, Gottingen, Germany
来源
LASER FOCUS WORLD | 2005年 / 41卷 / 06期
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D O I
暂无
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Most applications for excimer lasers require the output beam to be modified by homogenizing and then reshaping the beam profile to match the application. Novel optics and opto-mechanical design are used to transform the beams.
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页码:99 / +
页数:4
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