A transparent waveguide chip for versatile total internal reflection fluorescence-based microscopy and nanoscopy

Total internal reflection fluorescence (TIRF) microscopy is an imaging technique that, in comparison to confocal microscopy, does not require a trade-off between resolution, speed, and photodamage. Here, we introduce a waveguide platform for chip-based TIRF imaging based on a transparent substrate, which is fully compatible with sample handling and imaging procedures commonly used with a standard #1.5 glass coverslip. The platform is fabricated using standard complementary metal-oxide-semiconductor techniques which can easily be scaled up for mass production. We demonstrate its performance on synthetic and biological samples using both upright and inverted microscopes, and show how it can be extended to super-resolution applications, achieving a resolution of 116 nm using super resolution radial fluctuations. These transparent chips retain the scalable field of view of opaque chip-based TIRF and the high axial resolution of TIRF, and have the versatility to be used with many different objective lenses, microscopy methods, and handling techniques. We see this as a technology primed for widespread adoption, increasing both TIRF's accessibility to users and the range of applications that can benefit from it. Total internal reflection fluorescence microscopy typically relies on opaque optical waveguides, compatible only with upright microscopes. Here, a versatile approach is reported that uses CMOS-compatible transparent chips, demonstrated for the imaging of synthetic and biological samples, including super-resolution applications.