A bulk plasma generator based on a plasma cathode discharge

被引：6
|
作者：
Vizir, AV
Oks, EM
Shandrikov, MV
Yushkov, GY
机构：
[1] Russian Acad Sci, Inst High Current Elect, Siberian Div, Tomsk 634055, Russia
[2] State Univ Control Syst & Radio Elect, Tomsk 634050, Russia
来源：
INSTRUMENTS AND EXPERIMENTAL TECHNIQUES | 2003年 / 46卷 / 03期
关键词：
Physical Chemistry; Service Life; Vacuum Chamber; Discharge Current; Discharge Plasma;
D O I：
10.1023/A:1024478708509
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The design, operating features, and parameters of a bulk plasma generator based on a steady-state low-pressure discharge with the additional injection of electrons from an external emitter are described. An additional constricted-arc discharge plasma is used as an electron emitter. This type of a discharge system ensures the formation of a homogeneous and stable gas plasma with a concentration of up to 2 X 10(10) cm(-3) in a volume of 1 m(3) at a pressure of up to 3 X 10(-4) Torr in a vacuum chamber. At a discharge current of up to 10 A, its voltage is 100-150 V. The device is characterized by a high efficiency of the energy utilization and a long service life, can operate with chemically active gases, and is easy to adjust and maintain.
引用
收藏
页码：384 / 387
页数：4
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