Micro lens imprinted on Pyrex glass by using amorphous Ni-P alloy mold

We fabricated micro lenses on a Pyrex glass using thermal nanoimprint technology. The mold material employed to imprint on the Pyrex glass was a Ni/Ti/Si substrate electroless-plated with an amorphous Ni-P alloy. The fabrication of the mold involved high precision FIB processing. In this technique we used a newly developed low-cost mold for imprinting on Pyrex glass rather than using the commonly employed more expensive mold made of glass-like carbon material. Micro lens shaped concave curvatures of radii 12 mu m and 20 mu m were created on mold by an FIB system equipped with three-dimensional CAD software. The mold was then used for thermal imprinting on Pyrex glass substrate to fabricate lenses. The accuracy of Ni-P mold proved to be far superior to that of pure Ni mold. (c) 2008 Elsevier B.V. All rights reserved.