Highly transparent nano-crystalline diamond film's grown by microwave CVD

被引：11
|
作者：
Bhusari, DM [1 ]
Yang, JR
Wang, TY
Lin, ST
Chen, KH
Chen, LC
机构：
[1] Acad Sinica, Inst Atom & Mol Sci, Taipei, Taiwan
[2] Natl Taiwan Inst Technol, Dept Mech Engn, Taipei 10772, Taiwan
[3] Natl Taiwan Univ, Ctr Condensed Matter Sci, Taipei 10764, Taiwan
来源：
SOLID STATE COMMUNICATIONS | 1998年 / 107卷 / 06期
关键词：
thin films; chemical vapor deposition; optical properties;
D O I：
10.1016/S0038-1098(98)00226-9
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
We report here the growth of highly transparent nano-crystalline diamond films on quartz substrates by microwave plasma enhanced CVD. Optical transmittance of greater than 73% beyond 700 nm has been obtained for films as thick as 1 mu m, while for 0.6 mu m thick films it is 80%. Such high optical transparency of these films is primarily attributed to the smoothness of their surface (average roughness of about 100-130 Angstrom) as well as the high content of sp(3) bonded carbon. A growth model for explaining the dependence of optical transparency on various deposition parameters is also proposed. (C) 1998 Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：301 / 305
页数：5
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