Optical Interface Platform for DRAM Integration

被引：0
|
作者：
Ji, Ho-Chul [1 ]
Ha, K. H. [1 ]
Joe, I. S. [1 ]
Kim, S. G. [1 ]
Na, K. W. [1 ]
Shin, D. J. [1 ]
Suh, S. D. [1 ]
Park, Y. D. [1 ]
Chung, C. H. [1 ]
机构：
[1] Samsung Elect, Semicond R&D Ctr, Yongin 446711, South Korea
来源：
2011 OPTICAL FIBER COMMUNICATION CONFERENCE AND EXPOSITION (OFC/NFOEC) AND THE NATIONAL FIBER OPTIC ENGINEERS CONFERENCE | 2011年
关键词：
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We present a new bulk-Si optical platform for the optical interfaces toward DRAM integration with localized SOI structure and SPE. The demonstration shows that the waveguide and coupling loss are -0.61dB/mm and -2.6dB, respectively. (C) 2011 Optical Society of America
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页数：3
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