Improved H2S and Cl2 Sensing Characteristics of Pure and Au Incorporated WO3 Thin Films

被引：3
|
作者：
Ramgir, Niranjan S. [1 ]
Ganapathi, S. Kailasa [1 ]
Kaur, M. [1 ]
Mishra, S. [1 ]
Datta, N. [1 ]
Aswal, D. K. [1 ]
Gupta, S. K. [1 ]
Yakhmi, J. V. [1 ]
机构：
[1] Bhabha Atom Res Ctr, Tech Phys Div, Bombay 400085, Maharashtra, India
来源：
SOLID STATE PHYSICS: PROCEEDINGS OF THE 55TH DAE SOLID STATE PHYSICS SYMPOSIUM 2010, PTS A AND B | 2011年 / 1349卷
关键词：
WO3; doping; thin film; sensor; H2S; Cl-2; SENSOR;
D O I：
10.1063/1.3606040
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
Gas sensing properties of pure and Au incorporated WO3 thin films towards H2S and Cl-2 have been investigated. The sensor films were able to detect H2S and Cl-2 selectively at an operating temperature of 150 and 200 degrees C, respectively. Effect of gas concentration and Au loading have been investigated and correlated with the observed sensitivity values. Pure WO3 films exhibited better sensing characteristics towards H2S (S = 17, 10 ppm, 150 degrees C) while sensor film containing Au thickness of 21.6 nm exhibited a maximum sensitivity towards Cl-2 (S = 89, 10 ppm, 200 degrees C)..
引用
收藏
页码：679 / +
页数：2
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