Research of mechanical stresses in micromechanical structures based on silicon carbide films produced by magnetron sputtering

被引：0
|
作者：
Mikhailova, O. N. [1 ]
Korlyakov, A. V. [1 ]
Lagosh, A. V. [1 ]
机构：
[1] St Petersburg State Electrotech Univ, St Petersburg 197376, Russia
来源：
24TH INTERNATIONAL CONFERENCE ON VACUUM TECHNIQUE AND TECHNOLOGY | 2017年 / 872卷
关键词：
D O I：
10.1088/1742-6596/872/1/012043
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Investigations of the effect of residual atmosphere in the magnetron chamber on the mechanical stresses and the shape of micromechanical structure based on SiC film are discussed. Measurements of the curvature radius of SiC micromechanical structure deflection are presented.
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页数：3
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