Zero-Bias Power-Detector Circuits based on MoS2 Field-Effect Transistors on Wafer-Scale Flexible Substrates

被引:19
|
作者
Reato, Eros [1 ,2 ]
Palacios, Paula [3 ]
Uzlu, Burkay [1 ,2 ]
Saeed, Mohamed [3 ]
Grundmann, Annika [4 ]
Wang, Zhenyu [5 ]
Schneider, Daniel S. [1 ,2 ]
Wang, Zhenxing [1 ]
Heuken, Michael [4 ,6 ]
Kalisch, Holger [4 ]
Vescan, Andrei [4 ]
Radenovic, Aleksandra [5 ]
Kis, Andras [5 ]
Neumaier, Daniel [1 ,7 ]
Negra, Renato [3 ]
Lemme, Max C. [1 ,2 ]
机构
[1] AMO GmbH, Otto Blumenthal Str 25, D-52074 Aachen, Germany
[2] Rhein Westfal TH Aachen, Chair Elect Devices, Otto Blumenthal Str 25, D-52074 Aachen, Germany
[3] Rhein Westfal TH Aachen, Chair High Frequency Elect, Kopernikusstr 16, D-52074 Aachen, Germany
[4] Rhein Westfal TH Aachen, Compound Semicond Technol, Sommerfeldstr 18, D-52074 Aachen, Germany
[5] Ecole Polytech Fed Lausanne, Sch Engn, BM 2141,Stn 17, CH-1015 Lausanne, Switzerland
[6] AIXTRON SE, Domkaulstr 2, D-52134 Herzogenrath, Germany
[7] Berg Univ Wuppertal, Lise Meitner Str 13, D-42119 Wuppertal, Germany
关键词
2D materials; MoS; (2) field-effect transistors; power detectors; radio-frequency flexible devices; zero power consumption; MONOLAYER MOS2; CONTACT RESISTANCE; GRAPHENE; RF; GROWTH;
D O I
10.1002/adma.202108469
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The design, fabrication, and characterization of wafer-scale, zero-bias power detectors based on 2D MoS2 field-effect transistors (FETs) are demonstrated. The MoS2 FETs are fabricated using a wafer-scale process on 8 mu m-thick polyimide film, which, in principle, serves as a flexible substrate. The performances of two chemical vapor deposition MoS2 sheets, grown with different processes and showing different thicknesses, are analyzed and compared from the single device fabrication and characterization steps to the circuit level. The power-detector prototypes exploit the nonlinearity of the transistors above the cut-off frequency of the devices. The proposed detectors are designed employing a transistor model based on measurement results. The fabricated circuits operate in the Ku-band between 12 and 18 GHz, with a demonstrated voltage responsivity of 45 V W-1 at 18 GHz in the case of monolayer MoS2 and 104 V W-1 at 16 GHz in the case of multilayer MoS2, both achieved without applied DC bias. They are the best-performing power detectors fabricated on flexible substrate reported to date. The measured dynamic range exceeds 30 dB, outperforming other semiconductor technologies like silicon complementary metal-oxide-semiconductor circuits and GaAs Schottky diodes.
引用
收藏
页数:10
相关论文
共 50 条
  • [1] A wafer-scale synthesis of monolayer MoS2 and their field-effect transistors toward practical applications
    Liu, Yuchun
    Gu, Fuxing
    NANOSCALE ADVANCES, 2021, 3 (08): : 2117 - 2138
  • [2] Wafer-scale transferred multilayer MoS2 for high performance field effect transistors
    Zhang, Simeng
    Xu, Hu
    Liao, Fuyou
    Sun, Yangye
    Ba, Kun
    Sun, Zhengzong
    Qiu, Zhi-Jun
    Xu, Zihan
    Zhu, Hao
    Chen, Lin
    Sun, Qingqing
    Zhou, Peng
    Bao, Wenzhong
    Zhang, David Wei
    NANOTECHNOLOGY, 2019, 30 (17)
  • [3] Graphene nanoribbon field-effect transistors on wafer-scale epitaxial graphene on SiC substrates
    Hwang, Wan Sik
    Zhao, Pei
    Tahy, Kristof
    Nyakiti, Luke O.
    Wheeler, Virginia D.
    Myers-Ward, Rachael L.
    Eddy, Charles R., Jr.
    Gaskill, D. Kurt
    Robinson, Joshua A.
    Haensch, Wilfried
    Xing, Huili
    Seabaugh, Alan
    Jena, Debdeep
    APL MATERIALS, 2015, 3 (01):
  • [4] Piezoresistive strain sensing with flexible MoS2 field-effect transistors
    Tarasov, Alexey
    Tsai, Meng-Yen
    Taghinejad, Hossein
    Campbell, Philip M.
    Adibi, Ali
    Vogel, Eric M.
    2015 73RD ANNUAL DEVICE RESEARCH CONFERENCE (DRC), 2015, : 159 - 160
  • [5] Induction heating effect on the performance of flexible MoS2 field-effect transistors
    Shin, Jong Mok
    Choi, Jun Hee
    Kim, Do-Hyun
    Jang, Ho-Kyun
    Yun, Jinyoung
    Na, Junhong
    Kim, Gyu-Tae
    APPLIED PHYSICS LETTERS, 2017, 111 (15)
  • [6] Wafer-Scale, Homogeneous MoS2 Layers on Plastic Substrates for Flexible Visible-Light Photodetectors
    Lim, Yi Rang
    Song, Wooseok
    Han, Jin Kyu
    Lee, Young Bum
    Kim, Sung Jun
    Myung, Sung
    Lee, Sun Sook
    An, Ki-Seok
    Choi, Chel-Jong
    Lim, Jongsun
    ADVANCED MATERIALS, 2016, 28 (25) : 5025 - 5030
  • [7] Electronic Devices and Circuits Based on Wafer-Scale Polycrystalline Monolayer MoS2 by Chemical Vapor Deposition
    Wang, Lin
    Chen, Li
    Wong, Swee Liang
    Huang, Xin
    Liao, Wugang
    Zhu, Chunxiang
    Lim, Yee-Fun
    Li, Dabing
    Liu, Xinke
    Chi, Dongzhi
    Ang, Koh-Wee
    ADVANCED ELECTRONIC MATERIALS, 2019, 5 (08):
  • [8] Flexible High-Temperature MoS2 Field-Effect Transistors and Logic Gates
    Zou, Yixuan
    Li, Peng
    Su, Caizhen
    Yan, Jiawen
    Zhao, Haojie
    Zhang, Zekun
    You, Zheng
    ACS NANO, 2024, 18 (13) : 9627 - 9635
  • [9] Top gate engineering of field-effect transistors based on wafer-scale two-dimensional semiconductors
    Ma, Jingyi
    Chen, Xinyu
    Sheng, Yaochen
    Tong, Ling
    Guo, Xiaojiao
    Zhang, Minxing
    Luo, Chen
    Zong, Lingyi
    Xia, Yin
    Sheng, Chuming
    Wang, Yin
    Gou, Saifei
    Wang, Xinyu
    Wu, Xing
    Zhou, Peng
    Zhang, David Wei
    Wu, Chenjian
    Bao, Wenzhong
    JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2022, 106 : 243 - 248
  • [10] Contact optimisation strategy for wafer-scale field-effect transistors based on two-dimensional semiconductors
    Tong, Ling
    Guo, Xiaojiao
    Shen, Zhangfeng
    Zhou, Lihui
    Ma, Jingyi
    Chen, Xinyu
    Chen, Honglei
    Xia, Yin
    Sheng, Chuming
    Gou, Saifei
    Wang, Die
    Wang, Xinyu
    Dong, Xiangqi
    Zhu, Yuxuan
    Zhang, Xinzhi
    Zhang, David Wei
    Dai, Sheng
    Li, Xi
    Zhou, Peng
    Wang, Yangang
    Bao, Wenzhong
    JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY, 2023, 133 (230-237): : 230 - 237