Testing of non-evaporable getter pills for standardization of their pumping performance testing method

被引:8
|
作者
Yoshida, Hajime
机构
关键词
TEMPERATURE; DEPOSITION; ACTIVATION; PRESSURE; SPEED;
D O I
10.1016/j.vacuum.2021.110797
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The pumping characteristics of non-evaporable getter (NEG) pills were measured according to ASTM F 798-97 (2002) for standardizing their pumping performance testing method. St707 (Zr-V-Fe alloy) and ZAO (Zr-V-Ti-Al alloy) were used as samples. The repeatability of three measurements for the NEGs was within 12% for H-2 and 5% for CO, respectively, except for the first measurement. The data scatter of pumping speed per unit nominal area of the St707 which had different years of fabrication and sizes, was within 30% for H-2 and within a factor of 2 for CO, whereas that of the ZAO was 3 times larger at maximum than that of the St707 for both H-2 and CO. Our results were compared with those from previous studies and calculation models.
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页数:10
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