Recent advances in magnetron sputtering

被引：141
|
作者：
Arnell, RD [1 ]
Kelly, PJ [1 ]
机构：
[1] Univ Salford, Ctr Adv Mat & Surface Engn, Salford M5 4WT, Lancs, England
来源：
SURFACE & COATINGS TECHNOLOGY | 1999年 / 112卷 / 1-3期
关键词：
magnetron sputtering; structure zone modelling; pulsed DC sputtering;
D O I：
10.1016/S0257-8972(98)00749-X
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The paper will outline the historical development of sputtering techniques up to the recent development of closed-field unbalanced magnetron sputtering (CFUBMS). Examples will then be given of the use of CFUBMS to develop advanced coatings for industrial applications, including corrosion resistant coatings for aerospace, hard ceramic coatings for wear resistance, and coatings with novel thermal and chemical properties. Finally, current development in the technology and in understanding of the principles of the process will be described. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码：170 / 176
页数：7
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