Anisotropic nano-scale resolution in 3D Bragg coherent diffraction imaging

被引:24
|
作者
Cherukara, Mathew J. [1 ]
Cha, Wonsuk [2 ]
Harder, Ross J. [2 ]
机构
[1] Argonne Natl Lab, Ctr Nanoscale Mat, Lemont, IL 60439 USA
[2] Argonne Natl Lab, Adv Photon Source, Lemont, IL 60439 USA
关键词
RAY; STRAIN; CRYSTALLOGRAPHY; NANOCRYSTAL; LASER;
D O I
10.1063/1.5055235
中图分类号
O59 [应用物理学];
学科分类号
摘要
We demonstrate that the resolution of three-dimensional (3D) real-space images obtained from Bragg coherent x-ray diffraction measurements is direction dependent. We propose and demonstrate the effectiveness of a metric to determine the spatial resolution of images that accounts for the directional dependence. The measured direction dependent resolution of similar to 4-9 nm is higher than the best previously obtained 3D measurements. Finally, we quantify the relationship between the resolution of recovered real-space images and dosage and discuss its implications in the light of next generation synchrotrons. Published by AIP Publishing.
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收藏
页数:5
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