Vacuum packaged low noise gyroscope with sub mdeg|s|√HZ resolution

被引：0

作者：

Lee, JY ^{[1
]}

Jeon, SH ^{[1
]}

Jung, HK ^{[1
]}

Chang, HK ^{[1
]}

Kim, YK ^{[1
]}

机构：

[1] Seoul Natl Univ, Sch Elect Engn & Comp Sci, Seoul 151600, South Korea

来源：

MEMS 2005 MIAMI: TECHNICAL DIGEST | 2005年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes a vacuum packaged z-axis gyroscope with sub milli-deg/s/root HZ noise floor. A design rule for the low noise gyroscope is suggested, and lateral vibrating gyroscope was fabricated through a metal interlaid SiOG technology. High aspect ratio (20:1) silicon structures were fabricated without footing damage. The easy method for the electric connection of feed through holes that are 150 gm in diameter is suggested for vacuum package of SiOG structure. The vacuum packaged gyroscope with a quality factor of 10,000 exhibits a noise floor of 0.4 mdeg/s/root HZ, and a bias stability of 4.7 mdeg/s (= 17 deg/hour), where the scale factor is 68.5 mV/deg/s with 0.6% linearity error for the range of 200 deg/s.

引用

页码：359 / 362

页数：4

共 26 条

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