Quantitative nanotribology by atomic force microscopy

被引:8
|
作者
Morel, N
Tordjeman, P
Ramonda, M
机构
[1] Univ Montpellier 2, UMR CNRS 5011, LAIN, F-34095 Montpellier, France
[2] Univ Montpellier 2, LMCP, Lab Microscopie Champ Proche, F-34095 Montpellier, France
关键词
D O I
10.1088/0022-3727/38/6/018
中图分类号
O59 [应用物理学];
学科分类号
摘要
Nanotribology with an atomic force microscope (AFM) requires an accurate calibration of the mechanical response of the cantilever. To determine the friction coefficient on the nanoscale, we have developed a new calibration method to determine the normal and lateral cantilever stiffness, k(cantilever)(N) and k(cantilever)(L), used to calculate the normal and friction forces, which allow us to calculate the nanofriction coefficient mu. Comparative experiments on a silicon wafer with two cantilevers of different dimensions validate our calibration method. The nanofriction coefficient mu of two materials, one silicate glass and the same glass with a 100 A SnO2 layer, has been measured by AFM after calibrating the cantilever stiffness. The different values of mu show the lubrication effects of the SnO2 layer on the nanoscale.
引用
收藏
页码:895 / 899
页数:5
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