Ultra-thin TaN Films for Superconducting Nanowire Single-Photon Detectors

被引：29

作者：

Il'in, K. ^{[1
]}

Hofherr, M. ^{[1
]}

Rall, D. ^{[1
]}

Siegel, M. ^{[1
]}

Semenov, A. ^{[2
]}

Engel, A. ^{[3
]}

Inderbitzin, K. ^{[3
]}

Aeschbacher, A. ^{[3
]}

Schilling, A. ^{[3
]}

机构：

[1] Karlsruher Inst Technol, Inst Mikro & Nanoelekt Syst, D-76187 Karlsruhe, Germany

[2] DLR Inst Planetary Res, D-12489 Berlin, Germany

[3] Univ Zurich, Inst Phys, CH-8057 Zurich, Switzerland

来源：

JOURNAL OF LOW TEMPERATURE PHYSICS | 2012年 / 167卷 / 5-6期

关键词：

TaN; Superconducting thin films; Superconducting detectors;

D O I：

10.1007/s10909-011-0424-3

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Ultra-thin films of superconducting tantalum nitride are deposited by reactive magnetron sputtering on heated sapphire substrates. The critical temperature T (C)=10.25 K is reached for films thicker than 10 nm. A superconducting nanowire single-photon detector in the form of a meander line with a width of 110 nm was made from 5 nm thick TaN film. The detector had a transition temperature of 8.3 K and a critical current density of 4 MA/cm(2) at 4.2 K. A photon detection efficiency of 20% has been obtained for the detector with a filling factor of 0.55 at wavelengths up to 700 nm.

引用

页码：809 / 814

页数：6

共 50 条

[1] Ultra-thin TaN Films for Superconducting Nanowire Single-Photon Detectors
K. Il’in
M. Hofherr
D. Rall
M. Siegel
A. Semenov
A. Engel
K. Inderbitzin
A. Aeschbacher
A. Schilling
Journal of Low Temperature Physics, 2012, 167 : 809 - 814
[2] Superconducting Nanowire Single-Photon Detectors
Berggren, K. K.
Anant, V.
Baek, B.
Dauler, E.
Hu, X.
Kerman, A. J.
Marsili, F.
Mirin, R. P.
Molnar, R.
Nam, S. W.
Najafi, F.
Stevens, M. J.
Wong, F.
Zhong, Tian
2011 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2011,
[3] Comparison of Superconducting Nanowire Single-Photon Detectors Made of NbTiN and NbN Thin Films
Yang, Xiaoyan
You, Lixing
Zhang, Lu
Lv, Chaolin
Li, Hao
Liu, Xiaoyu
Zhou, Hui
Wang, Zhen
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 2018, 28 (01)
[4] Growth of NCCO superconducting ultra-thin films for photon detectors
Romano, P.
Riccio, M.
Nigro, A.
Guarino, A.
Martucciello, N.
Grimaldi, G.
2017 IEEE INTERNATIONAL WORKSHOP ON METROLOGY FOR AEROSPACE (METROAEROSPACE), 2017, : 193 - 197
[5] Niobium Superconducting Nanowire Single-Photon Detectors
Annunziata, Anthony J.
Santavicca, Daniel F.
Chudow, Joel D.
Frunzio, Luigi
Rooks, Michael J.
Frydman, Aviad
Prober, Daniel E.
IEEE TRANSACTIONS ON APPLIED SUPERCONDUCTIVITY, 2009, 19 (03) : 327 - 331
[6] Efficient detection of an ultra-bright single-photon source using superconducting nanowire single-photon detectors
Jin, Rui-Bo
Fujiwara, Mikio
Yamashita, Taro
Miki, Shigehito
Terai, Hirotaka
Wang, Zhen
Wakui, Kentaro
Shimizu, Ryosuke
Sasaki, Masahide
OPTICS COMMUNICATIONS, 2015, 336 : 47 - 54
[7] Infrared photon counting with superconducting nanowire single-photon detectors
Hadfield, Robert H.
Natarajan, Chandra M.
Tanner, Michael G.
2013 IEEE PHOTONICS CONFERENCE (IPC), 2013, : 368 - 369
[8] Nanocrystalline superconducting γ-Mo2N ultra-thin films for single photon detectors
Hofer, J. A.
Ginzburg, M.
Bengio, S.
Haberkorn, N.
MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2022, 275
[9] Superconducting nanowire single-photon detectors: physics and applications
Natarajan, Chandra M.
Tanner, Michael G.
Hadfield, Robert H.
SUPERCONDUCTOR SCIENCE & TECHNOLOGY, 2012, 25 (06):
[10] Doped niobium superconducting nanowire single-photon detectors
Tao Jia
Lin Kang
Labao Zhang
Qingyuan Zhao
Min Gu
Jian Qiu
Jian Chen
Biaobing Jin
Applied Physics B, 2014, 116 : 991 - 995

← 1 2 3 4 5 →