Micromachined shear stress sensors for flow control applications

被引：2
|
作者：
Sheplak, Mark [1 ]
Cattafesta, Louis [1 ]
Tian, Ye [1 ]
机构：
[1] Univ Florida, Interdisciplinary Microsyst Grp, Gainesville, FL 32611 USA
来源：
IUTAM SYMPOSIUM ON FLOW CONTROL AND MEMS | 2008年 / 7卷
关键词：
shear stress sensors; MEMS; flow control;
D O I：
10.1007/978-1-4020-6858-4_8
中图分类号：
V [航空、航天];
学科分类号：
08 ; 0825 ;
摘要：
This paper reviews existing microelectromechanical systems-based shear stress sensors in the context of their suitability for various flow control situations. The advantages and limitations of existing devices for use in flow control systems are discussed. Unresolved technical issues are summarized and recommendations provided for future sensor development.
引用
收藏
页码：67 / 73
页数：7
相关论文
共 50 条
  • [1] Micromachined Flow Sensors in Biomedical Applications
    Silvestri, Sergio
    Schena, Emiliano
    MICROMACHINES, 2012, 3 (02): : 225 - 243
  • [2] Two microthermal shear stress sensors: surface micromachined and bulk-bonding micromachined
    Shi, Shali
    Yi, Liang
    Chen, Dapeng
    Ou, Yi
    Jing, Yupeng
    Ye, Tianchun
    Cheng, Zhongyu
    JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS, 2008, 7 (04):
  • [3] Surface micromachined differential piezoelectric shear-stress sensors
    Williams, Randall P.
    Kim, Donghwan
    Gawalt, David P.
    Hall, Neal A.
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2017, 27 (01)
  • [4] Wall shear stress and pressure sensors development for active control of flow
    Tsamados, DM
    Meunier, D
    Laghrouche, M
    Boussey, J
    Tardu, S
    MICROMACHINING AND MICROFABRICATION PROCESS TECHNOLOGY IX, 2004, 5342 : 250 - 259
  • [5] Micromachined thermal shear-stress sensor for underwater applications
    Xu, Y
    Lin, Q
    Lin, GY
    Katragadda, RB
    Jiang, FK
    Tung, S
    Tai, YC
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2005, 14 (05) : 1023 - 1030
  • [6] Micromachined Thermal Time-of-Flight Flow Sensors and Their Applications
    Huang, Liji
    MICROMACHINES, 2022, 13 (10)
  • [7] Micromachined sensors for static and dynamic shear-stress measurements in aerodynamic flows
    Padmanabhan, A
    Sheplak, M
    Breuer, KS
    Schmidt, MA
    TRANSDUCERS 97 - 1997 INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS AND ACTUATORS, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 1997, : 137 - 140
  • [8] Micromachined sensors for automotive applications
    Dunn, William, 1600, (08):
  • [9] Micromachined flow sensors - a review
    Nguyen, NT
    FLOW MEASUREMENT AND INSTRUMENTATION, 1997, 8 (01) : 7 - 16
  • [10] Si-micromachined thermal flow sensors: devices, simulations and applications
    Lange, P.
    Poech, M.
    MICROELECTRONICS TECHNOLOGY AND DEVICES - SBMICRO 2011, 2011, 39 (01): : 283 - 290
12345