Embedded Capacitive Displacement Sensor for Nanopositioning Applications

被引：0
|
作者：
Avramov-Zamurovic, Svetlana [1 ]
Dagalakis, Nicholas G. [2 ]
Lee, Rae Duk [2 ]
Kim, Yong Sik [2 ]
Yoo, Jae Myung [2 ]
Yang, Seung Ho [2 ]
机构：
[1] USN Acad, Annapolis, MD 21402 USA
[2] Natl Inst Stand & Technol, Gaithersburg, MD 20899 USA
来源：
2010 CONFERENCE ON PRECISION ELECTROMAGNETIC MEASUREMENTS CPEM | 2010年
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The scale of nano objects requires very precise position determination. The state-of-the-art manipulators involve accurate nanometer positioning. This paper presents the design of a capacitive displacement sensor for a nanopositioning application. The challenges of designing a capacitor sensitive to nanometer movements that fits in the area of a few hundred square micrometers are described. Analysis of several different designs was carried out using commercial simulation software. Results suggest a sensing resolution of 10 nm displacement. A sensor prototype was fabricated and tested.
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页码：316 / +
页数：2
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