共 50 条
- [5] Taguchi optimization for SU-8 photoresist and its applications in microfluidic systems PHOTONICS TECHNOLOGY INTO THE 21ST CENTURY: SEMICONDUCTORS, MICROSTRUCTURES, AND NANOSTRUCTURES, 1999, 3899 : 440 - 447
- [6] SU-8 nanocomposite photoresist with low stress properties for microfabrication applications Microelectron Eng, 2006, 10 (1966-1970):
- [8] Femtosecond optical curing of SU-8 photoresist ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS XIII, 2020, 11292
- [10] Micro-Plasma Device Utilizing SU-8 Photoresist as a Barrier Rib IMID/IDMC 2006: THE 6TH INTERNATIONAL MEETING ON INFORMATION DISPLAY/THE 5TH INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE, DIGEST OF TECHNICAL PAPERS, 2006, : 21 - 23