Enhanced wettability of a SU-8 photoresist through a photografting procedure for bioanalytical device applications

被引:18
|
作者
Gao, Zhan [1 ]
Henthorn, David B. [1 ]
Kim, Chang-Soo [2 ]
机构
[1] Missouri Univ Sci & Technol, Dept Chem & Biol Engn, Rolla, MO 65409 USA
[2] Missouri Univ Sci & Technol, Dept Biol Sci, Dept Elect & Comp Engn, Rolla, MO 65409 USA
关键词
D O I
10.1088/0960-1317/18/4/045013
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this work, we detail a method whereby a polymeric hydrogel layer is grafted to negative tone photoresist SU-8 in order to improve its wettability. A photoinitiator is first immobilized on freshly prepared SU-8 samples, acting as the starting point for various surface modification strategies. Grafting of a 2-hydroxyethylmethacrylate-based hydrogel from the SU-8 surface resulted in the reduction of the static contact angle of a water droplet from 79 +/- 1 degrees to 36 +/- 1 degrees, while addition of a poly(ethylene glycol)-rich hydrogel layer resulted in further improvement (8 +/- 1 degrees). Wettability is greatly enhanced after 30 min of polymerization, with a continued but more gradual decrease in contact angle up to approximately 50 min. Hydrogel formation is triggered by exposure to UV irradiation, allowing for the formation of photopatterned structures using existing photolithographic techniques.
引用
收藏
页数:7
相关论文
共 50 条
  • [1] Simple photografting method to chemically modify and micropattern the surface of SU-8 photoresist
    Wang, YL
    Bachman, M
    Sims, CE
    Li, GP
    Allbritton, NL
    LANGMUIR, 2006, 22 (06) : 2719 - 2725
  • [2] Removal of SU-8 photoresist for thick film applications
    Dentinger, PM
    Clift, WM
    Goods, SH
    MICROELECTRONIC ENGINEERING, 2002, 61-2 : 993 - 1000
  • [3] Microplasma device utilizing SU-8 photoresist as a barrier rib
    Kim, Sung-O
    IEEE TRANSACTIONS ON PLASMA SCIENCE, 2008, 36 (04) : 1244 - 1245
  • [4] SU-8 nanocomposite photoresist with low stress properties for microfabrication applications
    Jiguet, Sebastien
    Bertsch, Arnaud
    Judelewicz, Moshe
    Hofmann, Heinrich
    Renaud, Philippe
    MICROELECTRONIC ENGINEERING, 2006, 83 (10) : 1966 - 1970
  • [5] Taguchi optimization for SU-8 photoresist and its applications in microfluidic systems
    Zhang, J
    Tan, KL
    Yang, LJ
    Gong, HQ
    Hong, GD
    Wang, XD
    Chen, LQ
    PHOTONICS TECHNOLOGY INTO THE 21ST CENTURY: SEMICONDUCTORS, MICROSTRUCTURES, AND NANOSTRUCTURES, 1999, 3899 : 440 - 447
  • [6] SU-8 nanocomposite photoresist with low stress properties for microfabrication applications
    Swiss Federal Institute of Technology, EPFL-STI-IMM-LMIS4, rue decublens-station 17, 1015 Lausanne, Switzerland
    不详
    不详
    Microelectron Eng, 2006, 10 (1966-1970):
  • [7] SU-8 thick photoresist processing as a functional material for MEMS applications
    Conradie, EH
    Moore, DF
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2002, 12 (04) : 368 - 374
  • [8] Femtosecond optical curing of SU-8 photoresist
    Marble, Christopher B.
    Marble, Kassie S.
    Yakovlev, Vladislav V.
    ADVANCED FABRICATION TECHNOLOGIES FOR MICRO/NANO OPTICS AND PHOTONICS XIII, 2020, 11292
  • [9] Volume Hologram Formation in SU-8 Photoresist
    Sabel, Tina
    POLYMERS, 2017, 9 (06)
  • [10] Micro-Plasma Device Utilizing SU-8 Photoresist as a Barrier Rib
    Jhuo, Long-Cai
    Kim, Sung-O
    IMID/IDMC 2006: THE 6TH INTERNATIONAL MEETING ON INFORMATION DISPLAY/THE 5TH INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE, DIGEST OF TECHNICAL PAPERS, 2006, : 21 - 23