Research on Micromachined Gyroscope with Electrostatic drive and Meso-Piezoresistive detection

被引：1
|
作者：
Shi, Yunbo [1 ]
Wang, Ruirong [1 ]
Du, Kang [1 ]
Liu, Jun [1 ]
机构：
[1] N Univ China, Natl Key Lab Elect Measurement Technol, Taiyuan 030051, Shanxi, Peoples R China
来源：
MATERIALS PROCESSING TECHNOLOGIES, PTS 1 AND 2 | 2011年 / 154-155卷
关键词：
electrostatic drive; meso-piezoresistive detection; structure design; micromachined gyroscope; fabrication process;
D O I：
10.4028/www.scientific.net/AMR.154-155.119
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
In this paper, the structure design and operating principle is introduced to micromachined gyroscope with electrostatic drive and piezoresistive detection. In the paper, the piezoresistive effect of multi-barrier nano-film is used as detection method, which achieves high piezoresistive sensitivity compared with Silicon piezoresistive device. The gyroscope structure and multi-barrier nano-film device is fabricated by using heteroepitaxy GaAs film on Si substrate which implements the process compatible. The natural frequencies of gyroscope are determined from the modal analysis.
引用
收藏
页码：119 / 123
页数：5
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