Copper(I) complexes as potential CVD precursors - Studies in the liquid state and gas phase

Cu(I) complexes with trimethyl phosphite and aliphatic perfluorinated carboxylates of the type {Cu-2{P(OMe)(3)}(2)(mu-<LF>RCOO)(2)] where R = CF3, C2F5, C3F7, C6F13, C7F15, <LF>C8F17, C9F19 have been prepared as viscous liquids. The <LF>spectroscopic results suggest the dimeric structures for complexes in the liquid state, where the metal ions are linked by the bridging carboxylates. This type of bonding was revealed in the gas phase as well. In mass spectra the most intensive signals were observed for the [Cu-2(RCOO)](+) and <LF>[Cu-2(RCOO)(2)](+) fragments. Thermal decomposition of <LF>complexes proceeds as a multistage process, yielding a Cu2O in the most of cases.