LCP MEMS Implantable Pressure Sensor for Intracranial Pressure Measurement

Numerous devices for the measurement of Intracranial Pressure (ICP) have been proposed; these include both wired and wireless systems, each of which having their own shortcomings. In this work, the following requirements for minimally invasive measurement of ICP are considered: low infection, biocompatibility, small size, accuracy and ease of use. With these requirements in mind, we propose an implantable ICP sensor based on Microelectromechanical Systems (MEMS). Liquid Crystal Polymer (LCP) is chosen as the biocompatible and flexible structure. This paper describes the significant characteristics of LCP that make it well suited for biomedical applications, and comparisons are made to other polymers in terms of biocompatibility and certification. The proposed LCP pressure sensor has been successfully fabricated, with a membrane area of 2mm x 2mm x 50 mu m.