ACCELERATED LIFETIME AND RELIABILITY TESTING OF LARGE-DEFLECTION PIEZOELECTRIC MICROSYSTEMS

被引：0
|
作者：
Rudy, R. Q. [1 ]
Sanchez, L. M. [1 ]
Tellers, M. [1 ,2 ]
Polcawich, R. G. [1 ]
机构：
[1] US Army, Res Lab, Adelphi, MD USA
[2] Univ Maryland, College Pk, MD USA
来源：
2015 TRANSDUCERS - 2015 18TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS) | 2015年
关键词：
Piezoelectric; lifetime; MEMS; reliability;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper reports, for the first time, accelerated lifetime testing and reliability of large displacement piezoelectric micro-electromechanical systems (MEMS) over trillions of cycles. Electrical, mechanical, and piezoelectric properties of cantilevers have been monitored over time and the surface topology has been observed through scanning electron microscopy.
引用
收藏
页码：1315 / 1317
页数：3
相关论文
共 50 条
  • [1] Modeling and design optimization of large-deflection piezoelectric folded cantilever microactuators
    Fang, HJ
    Liu, LT
    Ren, TL
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2006, 53 (01) : 237 - 240
  • [2] LARGE-DEFLECTION COMPUTATION OF THE PLASTICA
    FRIED, I
    COMPUTER METHODS IN APPLIED MECHANICS AND ENGINEERING, 1985, 49 (02) : 163 - 173
  • [3] Accelerated testing for demonstration of product lifetime reliability
    Krasich, M
    ANNUAL RELIABILITY AND MAINTAINABILITY SYMPOSIUM, 2003 PROCEEDINGS, 2003, : 117 - 123
  • [4] Reliability Accelerated Tests for Microsystems
    Bazu, Marius
    Galateanu, Lucian
    Ilian, Virgil Emil
    2011 34TH INTERNATIONAL SPRING SEMINAR ON ELECTRONICS TECHNOLOGY (ISSE 2011) - NEW TRENDS IN MICRO/NANOTECHNOLOGY, 2011, : 182 - 187
  • [5] Nonlinear Flexural Waves in Large-Deflection Beams
    Zhang S.
    Liu Z.
    Lu G.
    Acta Mechanica Solida Sinica, 2009, 22 (4) : 287 - 294
  • [6] ROLE OF SHEAR REINFORCEMENT IN LARGE-DEFLECTION BEHAVIOR
    KIGER, SA
    WOODSON, SC
    DALLRIVA, FD
    ACI STRUCTURAL JOURNAL, 1989, 86 (06) : 664 - 671
  • [7] Nonlinear large-deflection analysis of orthodontic wires
    Hayashi, K
    Araki, Y
    Mizoguchi, I
    ANGLE ORTHODONTIST, 2004, 74 (01) : 112 - 117
  • [8] Effect of thickness on large-deflection behavior of shells
    Chaudhuri, RA
    Hsia, RL
    AIAA JOURNAL, 1999, 37 (03) : 403 - 405
  • [9] NONLINEAR FLEXURAL WAVES IN LARGE-DEFLECTION BEAMS
    Zhang, Shanyuan
    Liu, Zhifang
    Lu, Guoyun
    ACTA MECHANICA SOLIDA SINICA, 2009, 22 (04) : 287 - 294
  • [10] PROBLEM OF LARGE-DEFLECTION ANALYSIS OF SPACE FIBERS
    MASSOUD, MF
    TEXTILE RESEARCH JOURNAL, 1971, 41 (10) : 793 - &
12345