Texture of IBAD TiN films as a function of ion-beam intensity and angular incidence

Because of the directionality of the ion beam, the coating of complex-shaped samples with the IBAD method will result in different growth conditions of the surface film. A study of variations of the ion-beam incidence angle and I/A ratio reveals inhomogeneous film microstructures. Interesting effects of ''ion-channelling'' on the crystallographic orientation of the him crystallites are shown. Complete biaxial orientations of the films are achieved with a beam incidence of about 45 degrees. Orientation changes occur as a function of the ion-beam intensity. Complex interactions of surface and/or strain energy minimization and the channelling-orientation effect are believed to be responsible for these findings.