[1] Univ Freiburg, IMTEK Dept Microsyst Engn, Lab MEMS Applicat, D-79110 Freiburg, Germany
[2] Hahn Schickard, D-79110 Freiburg, Germany
[3] Forschungszentrum Julich, Helmholtz Inst Erlangen Nurnberg Renewable Energy, D-91058 Erlangen, Germany
[4] Friedrich Alexander Univ Erlangen Nurnberg, Dept Chem & Biol Engn, D-91058 Erlangen, Germany