A micromirror device with post-fabrication re-adjustable pull-in parameters

被引：0

作者：

Elata, D ^{[1
]}

Bochobza-Degani, O ^{[1
]}

Nemirovsky, Y ^{[1
]}

机构：

[1] Technion Israel Inst Technol, IL-32000 Haifa, Israel

来源：

BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2003年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

In prevalent torsion actuators the angular travel range and pull-in instability are set and cannot be changed once the device is fabricated. The current work presents a novel adjustable micromirror device. By using multiple electrodes, the novel design allows continuous and reversible adjustment of the electromechanical response and pull-in instability of a fabricated device. This response adjustment is demonstrated on a torsion micromirror device and it is used for analog adjustment of the stable angular travel range of the micromirror. In addition, the inherent properties of the device enable simple duty cycle modulation of the dynamic response that can be used for gray-scale control.

引用

页码：1478 / 1481

页数：4

共 5 条

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