A micro diffuser/nozzle pump with fins on the sidewall

被引：0
|
作者：
Li, X. H. [1 ,2 ]
Yu, X. M. [1 ]
Zhang, D. C. [1 ]
Li, Z. H. [3 ]
Xu, W. H. [1 ]
机构：
[1] Peking Univ, Inst Microelect, Natl Key Lab Nano Micro Fabricat Technol, Beijing 100871, Peoples R China
[2] Beijing Jiaotong Univ, Sch Elect & Informat Engn, Beijing, Peoples R China
[3] Chinese Acad Sci, Inst Mech, Beijing 100864, Peoples R China
来源：
TRANSDUCERS '07 & EUROSENSORS XXI, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 | 2007年
关键词：
diffuser/nozzle; fins; flow efficiency; diffuser/nozzle pump;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
As the diffuser/nozzles are the key parts for micro diffuser/nozzle pumps, this paper reports a novel method for improving the flow efficiency by adding fins on its sidewall. The shape of the fin is imitative of the fish fins. Hence some fins fabricated through silicon micro-machining technology are integrated with the nozzle/diffusers. It has been testified that the big fins can improve the flow efficiency by 10 percent both for liquid and gas, which indicated that the corresponding pump performance would be improved by 20 percent. An excellent liquid pump performance is also gained in this paper.
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页数：2
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