A MEMS-Based Flow Sensor with Membrane Cantilever Beam Array Structure

被引：0
|
作者：
Tian, Bian [1 ]
Li, Huafeng [1 ]
Yang, Ning [1 ]
Liu, Hanyue [1 ]
Zhao, Yulong [1 ]
机构：
[1] Xi An Jiao Tong Univ, State Key Lab Mfg Syst Engn, Xian, Shaanxi, Peoples R China
来源：
2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS) | 2017年
关键词：
MEMS; flow sensor; membrane cantilever beam array structure;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper analyzed four different structures of flow sensor, the rectangular membrane cantilever beam array structure, the trapezoidal membrane cantilever beam array structure, the inverted trapezoidal membrane cantilever beam array structure and the triangular membrane cantilever beam array structure. The numerical and simulation results show that the inverted trapezoidal membrane cantilever beam array structure is the best among these four structures. The measuring range of the designed flow sensor and the effective optimization design are also discussed in this paper. The results reveal that the ideal measuring range of designed flow sensor is 0.3 m/s to 3.5 m/s.
引用
收藏
页码：185 / 189
页数：5
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