NANOMETROLOGY AND FEATURES OF METROLOGICAL ASSURANCE OF MEASUREMENTS OF THE ROUGHNESS AND RELIEF PARAMETERS OF NANOSTRUCTURED SURFACES

被引：0
|
作者：
Lysenko, V. G. [1 ]
Soloviov, V. V. [1 ]
Luskinovich, P. N. [1 ]
Zolotarevskii, S. Yu. [1 ]
Gubskii, K. L. [1 ]
机构：
[1] All Russia Res Inst Metrol Serv VNIIMS, Moscow, Russia
来源：
MEASUREMENT TECHNIQUES | 2011年 / 53卷 / 11期
关键词：
nanometrology; scanning probe microscopy; resolution; calibration;
D O I：
10.1007/s11018-011-9644-9
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Questions related to metrological assurance of measurements of the roughness and relief parameters of nanostructured surfaces are considered. On the basis of an analysis of current developments in the area of scanning probe microscopy, a description of the physical and technical characteristics of different types of instruments for measurements in the nanodimensional range is given and the traceability of these characteristics to standards of the unit of length is demonstrated.
引用
收藏
页码：1215 / 1221
页数：7
相关论文
共 12 条
  • [1] Nanometrology and features of metrological assurance of measurements of the roughness and relief parameters of nanostructured surfaces
    V. G. Lysenko
    V. V. Soloviov
    P. N. Luskinovich
    S. Yu. Zolotarevskii
    K. L. Gubskii
    Measurement Techniques, 2011, 53 : 1215 - 1221
  • [2] Outlooks and features of metrological assurance of dynamic parameters measurements in fiber optic communication systems in gigabyte range
    Romashkov, AP
    Tikhomirov, S
    SEVENTH INTERNATIONAL SYMPOSIUM ON LASER METROLOGY APPLIED TO SCIENCE, INDUSTRY, AND EVERYDAY LIFE, PTS 1 AND 2, 2002, 4900 : 401 - 407
  • [3] METROLOGICAL ASSURANCE OF MEASUREMENTS OF GEOMETRIC PARAMETERS OF ARTICLES BY MEANS OF NONDESTRUCTIVE TESTING
    Babadzhanov, L. S.
    Babadzhanova, M. L.
    MEASUREMENT TECHNIQUES, 2011, 53 (11) : 1222 - 1225
  • [4] Metrological assurance of measurements of geometric parameters of articles by means of nondestructive testing
    L. S. Babadzhanov
    M. L. Babadzhanova
    Measurement Techniques, 2011, 53 : 1222 - 1225
  • [5] Development of a System of Metrological Assurance of the Region of Measurements of the Energy Parameters of Laser Radiation
    V. S. Ivanov
    M. L. Kozachenko
    S. V. Tikhomirov
    N. P. Khatyrev
    Measurement Techniques, 2015, 57 : 1266 - 1272
  • [6] Development of a System of Metrological Assurance of the Region of Measurements of the Energy Parameters of Laser Radiation
    Ivanov, V. S.
    Kozachenko, M. L.
    Tikhomirov, S. V.
    Khatyrev, N. P.
    MEASUREMENT TECHNIQUES, 2015, 57 (11) : 1266 - 1272
  • [7] Metrological Assurance of Measurements of the Electromagnetic Parameters of Ferromagnetic Film Materials at High Frequencies
    V. A. Simkin
    N. N. Chernousova
    N. P. Yakimova
    Measurement Techniques, 2002, 45 : 1271 - 1273
  • [8] Metrological assurance of measurements of the electromagnetic parameters of ferromagnetic film materials at high frequencies
    Simkin, VA
    Chernousova, NN
    Yakimova, NP
    MEASUREMENT TECHNIQUES, 2002, 45 (12) : 1271 - 1273
  • [9] National system of metrological assurance of laser radiation energy parameters measurements in Ukraine
    Grishchenko, LV
    Solovyov, VS
    Timofeyev, YP
    OPTOELECTRONIC METROLOGY, 1998, 4018 : 29 - 37
  • [10] Metrological assurance of measurements of the dimensional parameters of nanoparticles and thin films by small-angle X-ray diffractometry methods
    Avilov A.S.
    Volkov V.V.
    Gubin S.P.
    Dyakova Y.A.
    Ermakova M.A.
    Zaporozhets M.A.
    Kuzin Y.A.
    Marchenkova M.A.
    Mityukhlyaev V.A.
    Rustamova E.G.
    Sulyanov S.N.
    Todua P.A.
    Chekrygina D.I.
    Avilov, A. S. (avilovanatoly@mail.ru), 1600, Izdatel'stvo Nauka (08): : 309 - 316
12