Research on the ultra-precise measurement of cylinder diameters

Improving the measurement of a cylinder diameter to high accuracy is a classical problem in the field of manufacture. Therefore many kinds of measurement methods that used often nowadays have been studied and compared, such as mechanical method, ultrasonic method, optical method, and electrical method etc. The source of error and its influence on these measurement methods are discussed. Among these measurement methods, we particularly analysis probe-contact measurement method. To decrease the system error and to improve measurement accuracy, many methods that include using the ultra-precise motion part such as air-lubricated hydrostatic slide guide to take place of former part are proposed. Besides, the diffraction of laser on the edge of cylinder is also studied by means of theoretical analysis and simulation.