Spectral diagnostics of inductively coupled RF discharge plasma

被引：3
|
作者：
Abdullin, I. Sh [1 ]
Bykanov, A. N. [1 ]
Gafarov, I. G. [1 ]
Ibragimov, O. E. [2 ]
Sharafeev, R. F. [1 ]
机构：
[1] Kazan Natl Res Technol Univ, Kazan 420015, Tatarstan, Russia
[2] Innovat Technopk Idea, Kazan 420107, Tatarstan, Russia
来源：
HIGH ENERGY CHEMISTRY | 2012年 / 46卷 / 04期
关键词：
Inductively Couple Plasma; High Energy Chemistry; Rotational Temperature; Molecular Band; Negative System;
D O I：
10.1134/S0018143912040029
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Results of UV spectral measurements in low-pressure (30-65 Pa) and atmospheric-pressure inductively coupled radiofrequency discharges at different power inputs and gas compositions typical for that of industrial processing regimes are reported. Isolated molecular bands have been observed in the spectra; by analyzing the unresolved rotational temperature of these bands, the rotational temperature of the upper emission state can be found.
引用
收藏
页码：271 / 275
页数：5
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