Ab-initio calculations of indium migration in uniaxial strained silicon

被引:0
|
作者
Kim, Young-Kyu [1 ]
Park, Soon-Yeol [1 ]
Won, Taeyoung [1 ]
机构
[1] Inha Univ, Dept Elect Engn, Natl IT Res Ctr Computat Elect, Inchon 402751, South Korea
关键词
D O I
10.1007/978-3-211-72861-1_107
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, we present our ab-initio study on energy configurations, minimum energy path (MEP), and migration energy for neutral indium diffusion in a uniaxial tensile strained {00} silicon layer. Our ab-initio calculation of the electronic structure allowed us to figure out transient atomistic configurations during the indium diffusion in strained silicon. We found that the lowest-energy structure (ins - Si-i(Td)) consists of indium sitting on a substitutional site while stabilizing a silicon self-interstitial in a nearby tetrahedral position. Our ab-initio calculation implied that the next lowest energy structure is In-i(Td), the interstitial indium at the tetrahedral position. We employed the nudged elastic band (NEB) method for estimating the MEP between the two structures. The NEB method allowed us to find that that diffusion pathway of neutral indium is kept unchanged in strained silicon while the migration energy of indium fluctuates in strained silicon.
引用
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页码:441 / 444
页数:4
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