LP-MOCVD grown (InAs)(m)(GaAs)(m) short period superlattices on InP

(InAs)(m)(GaAs)(m) (1 less than or equal to m less than or equal to 12) short period superlattices (SPSs) have been grown on semi-insulated InP substrates with a 200 nm InP cap layer using low pressure metalorganic chemical vapor deposition (MOCVD). According to double crystal x-ray diffraction and transmission electron microscopy results, the critical layer thickness of(InAs),(GaAs), SPS was observed to be similar to 30 Angstrom (m = 5). For the SPS below the critical layer thickness, mirror-like surface morphology was found without defects, and strong intensity Fourier transformed photoluminescence (FT-PL) spectra were also obtained at room temperature. The SPS with m = 4 showed a drastic improvement in photoluminescence intensity of order of two compared to an InGaAs ternary layer. However, the SPS with a large value of m (m greater than or equal to 6), rough surface was observed with defects, with broad and weak FT-PL spectra. The surface morphology of SPS was greatly affected by the substrate orientation. The SPS with m = 5 was grown on two degree tilted substrate from (100) direction and showed poor surface morphology as compared to the one grown on (100) exact substrate Moreover, the SPS grown on a (111)B substrate showed a rough triangular pattern with Nomarski optical microscopy. In-situ thermal annealed SPS with m = 4 showed a 18 meV increase in PL peak energy compared to the as-grown sample due to phase separation resulting from thermal interdiffusion.