Micro-features measurement using meso-volume CMM

Paper will discuss an understanding for the compensation of the probe ball radius in a scanning process of micro-features. As will be shown, the indigenous CMM software does not always adequately compensate the stylus tip radius. As a result, the information about the real shape of the measured features can be distorted. In order to accurately measure precise geometric features, and in particular micro-features, a new algorithm for the compensation of the stylus tip radius in a CMM scanning process will be proposed. To demonstrate the performance of the indigenous CMM software as well as feasibilities of our new algorithm, we will show the results of measurements of the profiles of precise micro-feature such as silicon micro-grove. Tests will be carrying out on a fixed bridge, moving-table Mitutoyo LEGEX 910 CMM equipped with a MPP-300 scanning probe and also on a Zeiss ACCURA CMM equipped with a VAST GOLD scanning probe.