Low-cost, fast prototyping method of fabrication of the microreactor devices in soda-lime glass

In the context of biochips, the novel concept of a fast prototyping platform with application to surface chemistry studies is presented. Microreactors are fabricated in microscope glass slides, allowing for parallel screening. Both, the use of low-cost soda-lime glass and simplified, yet effective, method of masking render our approach affordable and flexible-which are two essential features of fast prototyping. The fabrication process is based on the deep etching of soda-lime glass slides. A photoresist/Cr bi-layer was used as a mask in order to support the deep etching of glass. A buffered oxide etchant/hydrochloric acid mixture was employed as an etching reagent, and etching conditions, namely composition and temperature, were optimised. Structures with depths exceeding 100 mu m and surface roughness below 10 nm were obtained. The application of the devices for oligopeptide immobilisation is demonstrated. (C) 2007 Elsevier B.V. All rights reserved.