TiO2/LiCl-Based Nanostructured Thin Film for Humidity Sensor Applications

被引:96
|
作者
Buvailo, Andrii I. [1 ,2 ]
Xing, Yangjun [1 ]
Hines, Jacqueline [3 ]
Dollahon, Norman [4 ]
Borguet, Eric [1 ]
机构
[1] Temple Univ, Dept Chem, Philadelphia, PA 19122 USA
[2] Kyiv Natl Taras Shevchenko Univ, Dept Chem, UA-01033 Kiev, Ukraine
[3] Appl Sensor Res & Dev Corp, Arnold, MD 21012 USA
[4] Villanova Univ, Dept Biol, Villanova, PA 19085 USA
关键词
humidity sensors; surface acoustic wave; titanium dioxide; thin films; lithium chloride; SENSING PROPERTIES; HIGH-SENSITIVITY; SAW SENSORS; FABRICATION; NANOWIRES;
D O I
10.1021/am1011035
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
A simple and straightforward method of depositing nanostructured thin films, based on LiCl-doped TiO2, on glass and LiNbO3 sensor substrates is demonstrated. A spin-coating technique is employed to transfer a polymer-assisted precursor solution onto substrate surfaces, followed by annealing at 520 degrees C to remove organic components and drive nanostructure formation. The sensor material obtained consists of coin-shaped nanoparticles several hundred nanometers in diameter and less than 50 nm thick. The average thickness of the film was estimated by atomic force microscopy (AFM) to be 140 nm. Humidity sensing properties of the nanostructured Material and sensor response times were studied using conductometric and surface acoustic wave (SAW) sensor techniques, revealing reversible signals with good reproducibility and fast response times of about 0.75 s. The applicability of this nanostructured film for construction of rapid humidity sensors was demonstrated. Compared with known complex and expensive methods of synthesizing sophisticated nanostructures for sensor applications, such as physical vapor deposition (PVD) and chemical vapor deposition (CVD), this work presents a relatively simple and inexpensive technique to produce SAW humidity sensor devices with competitive performance characteristics.
引用
收藏
页码:528 / 533
页数:6
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