A cylindrical micro ultrasonic motor using a micro-machined bulk piezoelectric transducer

被引：0
|
作者：
Kanda, T [1 ]
Makino, A [1 ]
Suzumori, K [1 ]
Morita, T [1 ]
Kurosawa, MK [1 ]
机构：
[1] Okayama Univ, Fac Engn, Dept Syst Engn, Okayama, Japan
来源：
2004 IEEE Ultrasonics Symposium, Vols 1-3 | 2004年
关键词：
piezoelectric actuator; ultrasonicmotor; micromotor; bulk piezoelectric material; micro machining;
D O I：
暂无
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
In this paper, micro ultrasonic motor using a micro-machined bulk piezoelectric transducer is introduced. Cylindrical shaped bulk piezoelectric transducer, a diameter of 0.8 mm and a height of 2.2 mm, was developed as stator transducer for traveling wave type ultrasonic motor. We have fabricated a cylindrical micro ultrasonic motor, a diameter of 2.0 mm and height of 5.9 mm using the stator transducer. We have also evaluated some characteristics and succeeded in driving the micro ultrasonic motor.
引用
收藏
页码：1298 / 1301
页数：4
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