Crystal structure and magnetic properties of SmCo-based films deposited on hot Si (100) substrates

被引：12
|
作者：
Li, Yuanxun [1 ]
Peng, Long [2 ]
机构：
[1] Univ Elect Sci & Technol China, State Key Lab Elect Thin Films & Integrated Devic, Chengdu 610054, Peoples R China
[2] Chengdu Univ Informat Technol, Coll Optoelect Technol, Chengdu 610225, Peoples R China
来源：
JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS | 2011年 / 323卷 / 05期
基金：
中国国家自然科学基金;
关键词：
SmCo film; Crystallization; Coercivity; COERCIVITY; RIBBONS;
D O I：
10.1016/j.jmmm.2010.09.050
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
SmCo-based films were deposited on Si (100) substrates by the rf magnetron sputtering process. The growth conditions are improved for the films deposited on hot Si substrates without the annealing process. The dependence of crystal structure and intrinsic coercivity on substrate temperature is chiefly investigated. It is suggested that TbCu(7) type structural films can be obtained with enhanced in-plane magnetic properties with proper substrate temperature. (C) 2010 Elsevier B.V. All rights reserved.
引用
收藏
页码：475 / 478
页数：4
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