Effect of temperature on structure and morphology of Bi4Ti3O12 thin films obtained from oxide precursors

This work reports the structure and morphology of Bi4Ti3O12 thin films as a function of the crystallization temperature. Films were prepared by the oxide precursor method. The structure was studied by X-ray diffraction analysis and the morphology by atomic force microscopy (AFM). A single phase of Bi4Ti3O12 was obtained for films crystallized at 500 degreesC, 600 degreesC and 700 degreesC for 2.5 h. AFM analysis showed that the film surfaces are very smooth, with dense microstructures and grain sizes ranging from 50 to 140 nm and roughness RMS less than 10 nm. (C) 2001 Elsevier Science B.V. All rights reserved.