Self-aligned silicon-germanium base hetero-junction bipolar technology - UHS2

被引:0
|
作者
Kasahara, T [1 ]
Kakimoto, Y
Fujita, A
Yamaguchi, T
Kato, H
Matsuno, N
机构
[1] NEC Yamagata Ltd, Yamagata, Japan
[2] NEC Corp Ltd, Cpd Semicond Device Div, Tokyo, Japan
[3] NEC Corp Ltd, Syst Devices & Fundamental Res, Tokyo, Japan
来源
NEC RESEARCH & DEVELOPMENT | 2001年 / 42卷 / 02期
关键词
bipolar transistor; SiGe (silicon germanium); heterojunction; graded; low noise; high frequency; self-aligned;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
NEC has developed the UHS2 (Ultra High Speed 2) process using the self-aligned Sice epitaxial base technology. The NPN transistor of 0.3 x 20 mum x 2 emitter has typical characteristics such as current gain h(FE) of 300, collector to emitter breakdown voltage BVceo of 2.7V, cutoff frequency f(T) of 62GHz, and maximum oscillation frequency f(max) of 64GHz. Using this technology, the newly developed NPN transistor 2SC5761 achieved a noise figure NF of 0.9dB at 2GHz.
引用
收藏
页码:230 / 234
页数:5
相关论文
共 21 条
  • [1] Comparison of gm-boosted oscillators in silicon field effect transistor and silicon-germanium hetero-junction bipolar transistor technology
    Ussmueller, Thomas
    Seemann, Kay
    Weigel, Robert
    2009 EUROPEAN MICROWAVE INTEGRATED CIRCUITS CONFERENCE (EUMIC 2009), 2009, : 539 - 542
  • [2] Comparison of gm-boosted oscillators in silicon field effect transistor and silicon-germanium hetero-junction bipolar transistor technology
    Ussmueller, Thomas
    Seemann, Kay
    Weigel, Robert
    EUWIT: 2009 EUROPEAN WIRELESS TECHNOLOGY CONFERENCE, 2009, : 258 - 261
  • [3] Investigation of deep traps in silicon-germanium epitaxial base bipolar transistors with a single polysilicon quasi self-aligned architecture
    Militaru, L
    Souifi, A
    Mouis, M
    Chantre, A
    Brémond, G
    MICROELECTRONICS RELIABILITY, 2001, 41 (02) : 253 - 263
  • [4] A LATERAL SILICON-ON-INSULATOR BIPOLAR-TRANSISTOR WITH A SELF-ALIGNED BASE CONTACT
    STURM, JC
    MCVITTIE, JP
    GIBBONS, JF
    PFEIFFER, L
    IEEE ELECTRON DEVICE LETTERS, 1987, 8 (03) : 104 - 106
  • [5] BASE ETCHED SELF-ALIGNED TRANSISTOR TECHNOLOGY FOR ADVANCED POLYEMITTER BIPOLAR-TRANSISTORS
    KUMAR, MJ
    ROULSTON, DJ
    ELECTRONICS LETTERS, 1994, 30 (10) : 819 - 820
  • [6] COLLECTOR BASE JUNCTION AVALANCHE EFFECTS IN ADVANCED DOUBLE-POLY SELF-ALIGNED BIPOLAR-TRANSISTORS
    LU, PF
    CHEN, TC
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1989, 36 (06) : 1182 - 1188
  • [7] 50-GHZ SELF-ALIGNED SILICON BIPOLAR-TRANSISTORS WITH ION-IMPLANTED BASE PROFILES
    WARNOCK, J
    CRESSLER, JD
    JENKINS, KA
    CHEN, TC
    SUN, JYC
    TANG, DD
    IEEE ELECTRON DEVICE LETTERS, 1990, 11 (10) : 475 - 477
  • [8] SELF-ALIGNED SIGE-BASE HETEROJUNCTION BIPOLAR-TRANSISTOR BY SELECTIVE EPITAXY EMITTER WINDOW (SEEW) TECHNOLOGY
    BURGHARTZ, JN
    COMFORT, JH
    PATTON, GL
    MEYERSON, BS
    SUN, JYC
    STORK, JMC
    MADER, SR
    STANIS, CL
    SCILLA, GJ
    GINSBERG, BJ
    IEEE ELECTRON DEVICE LETTERS, 1990, 11 (07) : 288 - 290
  • [9] A HIGH-SPEED BIPOLAR TECHNOLOGY FEATURING SELF-ALIGNED SINGLE-POLY BASE AND SUBMICROMETER EMITTER CONTACTS
    HUANG, WM
    DROWLEY, CI
    VANDEVOORDE, PJ
    PETTENGILL, D
    TURNER, JE
    KAPOOR, AK
    LIN, CH
    BURTON, G
    ROSNER, SJ
    BRIGHAM, K
    FU, HS
    OH, SY
    SCOTT, MP
    CHIANG, SY
    WANG, A
    IEEE ELECTRON DEVICE LETTERS, 1990, 11 (09) : 412 - 414