High aspect ratio taper-free micro and nano-channel fabrication in glass with ultrafast nondiffracting Bessel beams

被引：2
|
作者：
Courvoisier, F. [1 ]
Bhuyan, M. K. [1 ]
Jacquot, M. [1 ]
Lacourt, P. A. [1 ]
Salut, R. [1 ]
Furfaro, L. [1 ]
Dudley, John M. [1 ]
机构：
[1] Univ Franche Comte, Dept Opt PM Duffieux, FEMTO ST Inst, UMR CNRS 6174, F-25030 Besancon, France
来源：
LASER-BASED MICRO- AND NANOPACKAGING AND ASSEMBLY V | 2011年 / 7921卷
关键词：
Femtosecond laser; micromachining; high aspect ratio; SURFACE; FILAMENTATION; DIFFRACTION; SILICA;
D O I：
10.1117/12.875409
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Ultrafast laser pulses are a powerful tool to process dielectrics. Here, we review our recent work concerning high aspect ratio micro and nanochannel processing in glass. We show how femtosecond Bessel beams overcome many of the difficulties associated with Gaussian beams. We report on single shot processing of nanochannels with aspect ratio up to 100. Underlying physical phenomena are discussed.
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页数：8
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