An investigation of single and dual-type ''crystal originated particles''

被引：0
|
作者：
Gonzalez, F [1 ]
Rozgonyi, GA [1 ]
Gilgen, B [1 ]
Barbour, R [1 ]
机构：
[1] MICRON TECHNOL INC,BOISE,ID 83707
来源：
PROCEEDINGS OF THE FOURTH INTERNATIONAL SYMPOSIUM ON HIGH PURITY SILICON | 1996年 / 96卷 / 13期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：357 / 368
页数：12
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