Pirani pressure sensor with distributed temperature measurement

被引：0
|
作者：
de Jong, BR [1 ]
Bula, WP [1 ]
Zalewski, D [1 ]
van Baar, JJ [1 ]
Wiegerink, RJ [1 ]
机构：
[1] Univ Twente, MESA Res Inst, NL-7500 AE Enschede, Netherlands
来源：
PROCEEDINGS OF THE IEEE SENSORS 2003, VOLS 1 AND 2 | 2003年
关键词：
pressure sensors; Pirani sensors; thermal sensors; distributed sensing;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Surface micro-machined distributed Pirani pressure gauges, with designed heater-to-heat sink distances (gap-heights) of 0.35 mum and 1.10 mum, are successfully fabricated, modeled and characterized. Measurements and model response correspond within 5 % of the measured value in a pressure range of 10 to 2*10(4) Pa. The distributed nature of the sensor facilitates pressure measurement to be independent of the Temperature Coefficient of Resistance of the resistors. This also provides an inherent compensation for heat loss via the membrane supporting the heater, extending the lower pressure range.
引用
收藏
页码：718 / 722
页数：5
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