Au-NiO nanocrystalline thin films for sensor application

被引：4

作者：

Hotovy, I. ^{[1
]}

Huran, J. ^{[2
]}

Spiess, L. ^{[3
]}

Romanus, H. ^{[3
]}

Capone, S. ^{[4
]}

Rehacek, V. ^{[1
]}

Taurino, A. M. ^{[4
]}

Donoval, D. ^{[1
]}

Siciliano, P. ^{[4
]}

机构：

[1] Slovak Univ Technol Bratislava, Dept Microelect, Ilkovicova 3, Bratislava 81219, Slovakia

[2] Slovak Acad Sci, Inst Elect Engn, Bratislava 84239, Slovakia

[3] Tech Univ Ilmenau, Dept Mat Technol, D-98684 Ilmenau, Germany

[4] IMM CNR, I-73100 Lecce, Italy

来源：

PROCEEDINGS OF THE INTERNATIONAL CONFERENCE ON NANOSCIENCE AND TECHNOLOGY | 2007年 / 61卷

关键词：

D O I：

10.1088/1742-6596/61/1/087

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Nanocrystalline NiO thin films were deposited by dc reactive magnetron sputtering in a mixture of oxygen and argon and subsequently coated by Au on a NiO film surface. Very thin Au overlayers with a thickness of about 1 and 7 nm have been prepared by magnetron sputtering. Then, the surface modified NiO films have been analysed by TEM, EDX and SEM. NiO thin films showed a polycrystalline structure with the size of nanocrystals ranging from a few nanometers to 10 nm. Electrical responses of NiO-based structure towards hydrogen have been measured.

引用

页码：435 / 439

页数：5

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