Green-blue luminescence from nitrogen-implanted silicon after RTA

被引：0
|
作者：
Liu, YZ
Shi, WQ
Chen, JX
Li, YZ
Chen, ZJ
Sun, JL
Liu, XJ
Liu, ZX
Zhang, YH
Shen, GD
机构：
来源：
CHINESE SCIENCE BULLETIN | 1996年 / 41卷 / 19期
关键词：
N+ implantation; nanocrystalline Si; rapid thermal annealing (RTA); green-blue luminescence;
D O I：
暂无
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
引用
收藏
页码：1610 / 1612
页数：3
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