Computer analysis of the source image structure in 3D electron-optic systems: II. A stationary electromagnetic system

被引：1
|
作者：
Bad'in, LV [1 ]
Zyuzin, LN [1 ]
Safronov, SI [1 ]
Slavnov, YK [1 ]
Tarasov, RP [1 ]
机构：
[1] Res Inst Pulsed Technol, Moscow 115304, Russia
来源：
TECHNICAL PHYSICS | 2005年 / 50卷 / 02期
关键词：
Electron Beam; Imaging Quality; Computer Analysis; Source Image; Image Scanning;
D O I：
10.1134/1.1866443
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Computer analysis of the image of an arbitrary (point or extended) source obtained in 3D electron-optic systems is performed. The systems involve magnetostatic and electrostatic fields, which, respectively, focus and deflect the electron beams. Two approaches to image scanning are considered where the scan potentials are applied in two (symmetric and asymmetric) modes. It is shown that the spread function of the source, which characterizes the imaging quality of the system most fully, may serve as a primary computational criterion. (C) 2005 Pleiades Publishing, Inc.
引用
收藏
页码：249 / 258
页数：10
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