Optical Characteristics of Thin Films of In2O3 and ITO

被引：2
|
作者：
Tikhii, A. A. [1 ]
Nikolaenko, Yu. M. [1 ]
Zhikhareva, Yu. I. [2 ]
Zhikharev, I. V. [1 ]
机构：
[1] AA Galkin Donetsk Physicotech Inst, 72 R Luxemburg Str, UA-83114 Donetsk, Ukraine
[2] State Univ Telecommun, Kiev, Ukraine
来源：
Journal of Applied Spectroscopy | 2016年 / 83卷 / 03期
关键词：
indium oxide; ellipsometry; optical transmission; magnetron sputtering;
D O I：
10.1007/s10812-016-0314-1
中图分类号：
O433 [光谱学];
学科分类号：
0703 ; 070302 ;
摘要：
The results of ellipsometric investigations of thin films of In2O3 and In2O3:Sn (90:10%) (ITO) and spectral measurements of the optical transmission are presented. The In2O3 films were obtained by sputtering on Al2O3 [012] substrates with the use of improved magnetron equipment VUP-5M. The ITO films on CEC015S glass substrates were manufactured by PG&O. The thicknesses, refractive indices, and forbidden band gaps of the materials were determined. The obtained values agree with previously described results, indicating that the investigated films are of good quality.
引用
收藏
页码：478 / 480
页数：3
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