Dynamic Pressure/Temperature Behaviour of GaN-Based Chemical Sensors

被引:2
|
作者
Gillbanks, Jeremy [1 ]
Myers, Matthew [2 ]
Umana-Membreno, Gilberto A. [1 ]
Baker, Murray V. [3 ]
Nener, Brett D. [1 ]
Parish, Giacinta [1 ]
机构
[1] Univ Western Australia, Sch Engn, Perth, WA 6009, Australia
[2] Univ Western Australia, Perth, WA 6009, Australia
[3] Univ Western Australia, Sch Mol Sci, Perth, WA 6009, Australia
基金
澳大利亚研究理事会;
关键词
Sensors; Temperature sensors; Wide band gap semiconductors; Temperature measurement; Aluminum gallium nitride; HEMTs; MODFETs; AlGaN; GaN; chemical sensors; ion sensing; pressure sensors; reference-electrode free; semiconductor device stability; temperature sensors; FIELD-EFFECT TRANSISTORS; ISFET INTERFACE CIRCUIT; TEMPERATURE; MOBILITY; TRANSPORT; DRIFT; COMPENSATION; CONDUCTIVITY; DEVICES; LAYER;
D O I
10.1109/JSEN.2021.3090848
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Long-term operation of chemical sensors under dynamic pressure/temperature conditions for industrial or environmental monitoring is desirable and yet rarely achieved. We have investigated long-term (>20 hours) operation of a novel ion sensor technology under varying temperature and pressure conditions whilst controlling for chemical effects by use of chemically inert hydrocarbon oil as the sensor analyte. The gallium nitride-based transistor-like sensor technology under study has previously been demonstrated for sensing a wide-range of heavy metal and nutrient ions and offers potential improvements regarding chemical stability but until now only short-term testing (1 to 3 hours) in water has been reported, and not under multi-variate environmental conditions. We investigated the response under varying. We show that for measurements under continuously cycling pressure (between 10.3 and 172.3 bar) and temperature (between 30 and 60 degrees C) conditions, within any two-hour observation window, the sensor response is linear and repeatable with a high coefficient of determination. Furthermore the temperature dependence strongly dominates the pressure dependence. However, when the observation window during pressure and/or temperature variation is extended to approximately 20 hours, anomalous variations in response that are uncorrelated to any environmental conditions (temperature and pressure which were measured, and light and ions, which were not present) become evident. Yet this anomalous behaviour is not present when the pressure and temperature are invariant. This finding has significant implications for implementing these sensors in dynamic environments.
引用
收藏
页码:18877 / 18886
页数:10
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