Mid-Infrared Photodetection Enhanced by Localized Surface Plasmon Resonance Assisted NiSi/Si Schottky Photodetectors

被引：0
|
作者：
Syu, Hong-Jhang [1 ]
Su, Zih-Chun [1 ]
Sun, Ruei-Lien [1 ]
Lai, Hsin-Han [1 ]
Lin, Ching-Fuh [1 ]
机构：
[1] Natinoal Taiwan Univ, Grad Inst Photon & Optoelect, Taipei, Taiwan
来源：
2021 IEEE RESEARCH AND APPLICATIONS OF PHOTONICS IN DEFENSE CONFERENCE (RAPID) | 2021年
关键词：
surface plasmon resonance; inverted pyramid arrays; NiSi; Schottky; mid-infrared;
D O I：
10.1109/RAPID51799.2021.9521452
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Here, inverted-pyramid array structures (IPAS) are applied on NiSi/n-Si Schottky photodetectors to generate surface plasmon resonance and improve the photoresponse in mid-infrared region. Consequently, compared with the planar devices, the current response of 8-mu m-period IPAS devices increases 4.08 times in 3.2-mu m light illumination.
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页数：2
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